Fabrication of 3D Micro Structure by Dual Diffuser Lithography
نویسندگان
چکیده
منابع مشابه
Fabrication of 3D Micro- and Nano-Structures by Prism-Assisted UV and Holographic Lithography
Lithography, the fundamental fabrication process of semiconductor devices, is playing a critical role nowadays in the fabrication of microand nano-structures especially for the realization of micro-electro-mechanical systems (MEMS), microfluidic devices, photonic crystals, photonic integrated circuits, micro-optics, and plasmonic optoelectronic devices. These devices have various practical appl...
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ژورنال
عنوان ژورنال: Korean Journal of Materials Research
سال: 2013
ISSN: 1225-0562
DOI: 10.3740/mrsk.2013.23.8.447